微機電系統是在微電子技術基礎上產生和發展起來的多學科交叉的前沿科學研究領域,是面向21 世紀的高新科技. 介紹了微機電系統產生的背景影響、組成特征和基礎研究內容,綜述了微機電系統技術基礎所涉及的材料、微機械設計和模、微細加工技術以及微封裝與測試等領域,并對微機電系統的應用、典型的微器件、國內外的發展現狀及前景進行全面分析. 在此基礎上,論述了MEMS 技術目前存在的問題和未來發展的趨勢.
關鍵詞: 微機電系統; 基礎研究; 微加工技術;微型傳感器;現狀及展望

Abstract : Micro2Electro2Mechanical System(MEMS) developes on the basis of microelectronics. It is a scien2 tific researches frontier of multi2disciplines and a high technology in the 21st century. This paper presents the background ,characteristics and basic research. The principal techniques of MEMS such as material ,design and simulation ,micromachining ,packaging and testing are reviewed ,Typic microapparatus ,application prospect and the state2of2art of MEMS are also discussed in this paper . Furthermore ,some points of view of developing on MEMS in the future are put forward.
Keywords : micro2electro2mechanical system; basic research ; micromachining ; microsensor ; state2of art and
prospect